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Baffled Box Sources for SiO, ZnS
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The R. D. Mathis Company “Baffled Box” Silicon Monoxide Source, SiO source, has proven to be an extremely successful method of depositing Silicon Monoxide. Source material is positioned in the boat within separate cavities, when heated it follows an indirect path through a series of baffles and then out of the exhaust chimney. The substrate cannot see the bulk material at any time. This essentially eliminates any chance of spitting and streaming which causes pinhole type defects. Many of the sources shown are available with up, down or horizontal exhaust ports. Custom fabrication and larger volume sources to fit your specific process needs are available upon request. A paper describing the techniques of Silicon Monoxide deposition and results using the “Baffled Box Source” is available upon request…ask for “Silicon Monoxide Evaporation with the Multi-baffled Box Source” by Earl Olson of the Halex Corp. and R. D. Mathis.


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SO-10 1.4 257 360 1200°C Please login first


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SO-11 1.4 256 358 1200°C Please login first


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SO-20 0.86 333 286 1200°C Please login first


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SO-21 0.91 328 298 1200°C Please login first


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SO-22 1.34 246 330 1200°C Please login first


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SO-23 1.31 236 309 1200°C Please login first


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SO-24 1.67 264 441 1200°C Please login first


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SO-25 1.58 272 430 1200°C Please login first


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SO-26 1.62 271 439 1200°C Please login first


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SO-32 1.23 217 267 1200°C Please login first
SO-34 1.27 289 367 1200°C Please login first
SO-36 1.3 373 485 1200°C Please login first
SO-38 1.43 447 640 1200°C Please login first

   

     
Call R.D. Mathis:
RD Mathis Company, 2840 Gundry Ave, Signal Hill, Ca 90755, F(562)595-0907
email: info@rdmathis.com