The R.D. Mathis Company
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Baffled Box Sources for SiO, ZnS
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The R. D. Mathis Company “Baffled Box” Silicon Monoxide Source, SiO source, has proven to be an extremely successful method of depositing Silicon Monoxide. Source material is positioned in the boat within separate cavities, when heated it follows an indirect path through a series of baffles and then out of the exhaust chimney. The substrate cannot see the bulk material at any time. This essentially eliminates any chance of spitting and streaming which causes pinhole type defects. Many of the sources shown are available with up, down or horizontal exhaust ports. Custom fabrication and larger volume sources to fit your specific process needs are available upon request. A paper describing the techniques of Silicon Monoxide deposition and results using the “Baffled Box Source” is available upon request…ask for “Silicon Monoxide Evaporation with the Multi-baffled Box Source” by Earl Olson of the Halex Corp. and R. D. Mathis.

Part Numbers:
Part #: Volts: Amps: Watts: Temp: Price/unit:
SO-100 3.7 540 1998 1200 Please login first
SO-150 3.9 620 2418 1200 Please login first
SO-200 4.1 860 3526 1200 Please login first
SO-250 4.15 955 3963 1200 Please login first
SO-300 4.2 1075 4515 1200 Please login first
SO-500 4.3 1135 4881 1200 Please login first
SO-800 4.4 1210 5324 1200 Please login first
SO-1000 4.5 1440 6480 1200 Please login first
SO-1500 4.6 1580 7268 1200 Please login first
SO-2000 4.8 1620 7776 1200 Please login first


Call R.D. Mathis:
RD Mathis Company, 2840 Gundry Ave, Signal Hill, Ca 90755, F(562)595-0907