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For complex coating applications or extremely high temperature materials, sputter deposition’s strengths can complement other deposition methods such as thermal evaporation.
Typical sizes of sputtering targets come in 2″, 3″, or 4″ diameters with 0.25″ thickness. Our standard available selection include common elemental metal targets. Some notable materials include aluminum, gold, and niobium sputtering targets.
For custom sizes and thicknesses, including millimeter sputtering targets, or compound targets, such as titanium nitride, let us know! Please contact us with your needs for specialty sputtering targets and we can see what we can do.
Copper is a well-known material for its electrical conductivity, making it used in applications such as semiconductors.
Thermal evaporation of copper is done using molybdenum boats, coming in many styles for different configurations.
Since thermal evaporation uses resistance heating to deposit material, copper’s conductive properties can affect the deposition.
However, this can be accounted for with aluminum oxide coating, for example: Part# S21-AO-Mo.
By applying this alumina to the full region of the evaporation area, current flowing through the source is unaffected by the copper evaporation material.
If higher capacity requirements are necessary for copper deposition, deeper areas of folded boats (FBs) may be needed. Upon request, these can also be coated in alumina to help deposit copper.
Folded Boat styles
Questions about copper depositions or any other material? Email our team at tech@rdmathis.com. Let us know if our selection can help you out.
Do you have any comments or concerns you want to share with us?
Please give us a call for further questions about The Evaporator.
Phone: (562) 426-7049
Email: info@rdmathis.com
Website: rdmathis.com
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